JPH055184B2 - - Google Patents

Info

Publication number
JPH055184B2
JPH055184B2 JP58055948A JP5594883A JPH055184B2 JP H055184 B2 JPH055184 B2 JP H055184B2 JP 58055948 A JP58055948 A JP 58055948A JP 5594883 A JP5594883 A JP 5594883A JP H055184 B2 JPH055184 B2 JP H055184B2
Authority
JP
Japan
Prior art keywords
substrate
source
drain
mos
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58055948A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59181669A (ja
Inventor
Katsuhiro Kawabuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP58055948A priority Critical patent/JPS59181669A/ja
Publication of JPS59181669A publication Critical patent/JPS59181669A/ja
Publication of JPH055184B2 publication Critical patent/JPH055184B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/64—Electrodes comprising a Schottky barrier to a semiconductor
    • H10D64/647—Schottky drain or source electrodes for IGFETs
JP58055948A 1983-03-31 1983-03-31 Ｍｏｓ型半導体装置 Granted JPS59181669A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58055948A JPS59181669A (ja) 1983-03-31 1983-03-31 Ｍｏｓ型半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58055948A JPS59181669A (ja) 1983-03-31 1983-03-31 Ｍｏｓ型半導体装置

Publications (2)

Publication Number Publication Date
JPS59181669A JPS59181669A (ja) 1984-10-16
JPH055184B2 true JPH055184B2 (en]) 1993-01-21

Family

ID=13013293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58055948A Granted JPS59181669A (ja) 1983-03-31 1983-03-31 Ｍｏｓ型半導体装置

Country Status (1)

Country Link
JP (1) JPS59181669A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4920399A (en) * 1988-09-12 1990-04-24 Linear Integrated Systems, Inc. Conductance-modulated integrated transistor structure
JP2751658B2 (ja) * 1990-04-27 1998-05-18 日本電気株式会社 半導体装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5947767A (ja) * 1982-09-10 1984-03-17 Nippon Telegr & Teleph Corp <Ntt> Ｍｉｓ形半導体素子

Also Published As

Publication number Publication date
JPS59181669A (ja) 1984-10-16

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